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How Does the HAL Vacuum Autoloader Improve Wafer Handling Efficiency?
In the highly precise world of semiconductor fabrication, where nanometer-scale defects can ruin entire wafer ...
(a) Separate design of main unit and stocker to make the production environment safer and more convenient
(b) Independent filter unit for easy identification of residual materials
(c) Silent device to reduce running noise
(d) Stainless steel storage tank, light and durable and easy to clean
(e) Control box independent design, microcomputer automatic movement
(f) Motor automatic protection device
(g) Automatic short beep alarm notification
(h) Add dust removal device if required by customers
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